NBN EN 62047-16 : 2015
Current
Current
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 16: TEST METHODS FOR DETERMINING RESIDUAL STRESSES OF MEMS FILMS - WAFER CURVATURE AND CANTILEVER BEAM DEFLECTION METHODS
Published date
09-21-2015
Publisher
Sorry this product is not available in your region.
| DocumentType |
Standard
|
| PublisherName |
Belgian Standards
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-16:2015 | Identical |
| EN 62047-16:2015 | Identical |
Summarise
Sorry this product is not available in your region.