NBN EN 62047-26 : 2016
Current
Current
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
Published date
06-28-2016
Publisher
Sorry this product is not available in your region.
Pertains to the structural design of MEMS and geometrical evaluation after MEMS processes.
| DocumentType |
Standard
|
| PublisherName |
Belgian Standards
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-26:2016 | Identical |
| EN 62047-26:2016 | Identical |
Summarise
Sorry this product is not available in your region.