NEN-ISO 16413:2020
Current
Current
The latest, up-to-date edition.
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Available format(s)
Hardcopy
Language(s)
English
Published date
09-01-2020
Publisher
NEN-ISO 16413 specifies a method for the evaluation of thickness, density and interface width of single layer and multi-layered thin films which have thicknesses between approximately 1 nm and 1 μm,on flat substrates, by means of X-Ray Reflectometry (XRR).
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