PD 6598:1996

1 Introduction
2 Measurements for common MOSFET parameters
2.1 Module COX
2.1.1 Objective
2.1.2 Test structure
2.1.3 Measurement
2.2 Module CJUNC
2.2.1 Objective
2.2.2 Test structures
2.2.3 Measurement
2.3 Module COVL
2.3.1 Objective
2.3.2 Test structure
2.3.3 Measurement
2.4 Module TRIOD
2.4.1 Objective
2.4.2 Test structure
2.4.3 Measurement
3 Measurements for JESSI CMOS modes specific parameters
3.1 Module LDD effects
3.1.1 Objective
3.1.2 Test structures
3.1.3 Measurement
3.2 Module threshold voltage parameters
3.2.1 Objective
3.2.2 Test structures
3.2.3 Measurement
3.3 Module KAPPA
3.3.1 Objective
3.3.2 Test structures
3.3.3 Measurement
3.4 Module subthreshold parameters
3.4.1 Objective
3.4.2 Test structures
3.4.3 Measurement
3.5 Module VMAX LAMBDA
3.5.1 Objective
3.5.2 Test structures
3.5.3 Measurement
3.6 Module substrate current
3.6.1 Objective
3.6.2 Test structures
3.6.3 Measurement
3.7 Module ringoscillator
3.7.1 Objective
3.7.2 Test structure
3.7.3 Measurement