PD ISO/TR 19319:2013

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Symbols and abbreviated terms
4 Determination of lateral resolution and sharpness
  by imaging of stripe patterns
5 Physical factors affecting lateral resolution,
  analysis area and sample area viewed by the analyser
  in AES and XPS
6 Measurements of analysis area and sample area viewed
  by the analyser in AES and XPS
Annex A (informative) - Reduction of image period for
        3-stripe gratings
Bibliography

Specifies: a; Functions and their relevance to lateral resolution: 1) Point spread function (PSF), 2) Line spread function (LSF), 3) Edge spread function (ESF), 4) Modulation transfer function (MTF), 5) Contrast transfer function (CTF). b; Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: 1) Imaging of a narrow stripe, 2) Imaging of a sharp edge, 3) Imaging of square-wave gratings. c; Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

This Technical Report describes: Functions and their relevance to lateral resolution: Point spread function (PSF) — see 4.1.1 Line spread function (LSF) — see 4.1.2 Edge spread function (ESF) — see 4.1.3 Modulation transfer function (MTF) — see 4.1.4 Contrast transfer function (CTF) — see 4.1.5. Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: Imaging of a narrow stripe — see 4.2 Imaging of a sharp edge — see 4.3 Imaging of square-wave gratings — see 4.4. Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.