PD ISO/TS 25138:2019
Superseded
View Superseded by
Surface chemical analysis. Analysis of metal oxide films by glow-discharge optical-emission spectrometry
Hardcopy , PDF
English
08-16-2019
02-24-2025
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
| Committee |
CII/60
|
| DocumentType |
Standard
|
| ISBN |
9780539061345
|
| Pages |
48
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1nm to 10000nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
| Standards | Relationship |
| ISO/TS 25138:2019 | Identical |
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