PN EN 62047-21 : 2014
Current
Current
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
Published date
01-19-2015
Publisher
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| Committee |
TC 60
|
| DocumentType |
Standard
|
| PublisherName |
Polish Committee for Standardization
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-21:2014 | Identical |
| IEC 62047-21:2014 | Identical |
Summarise
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