PN EN 62047-8 : 2011
Current
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The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 8: STRIP BENDING TEST METHOD FOR TENSILE PROPERTY MEASUREMENT OF THIN FILMS
Published date
01-12-2013
Publisher
Describes the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and specimen handling compared to the conventional tensile test.
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