PN EN ISO 14644-9 : 2012
Superseded
Superseded
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-9:2012)
Published date
11-09-2012
Publisher
Superseded date
11-05-2022
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Specifies the classification of the particle contamination levels on solid surfaces in clean rooms and associated controlled environment applications.
| Committee |
TC 161
|
| DocumentType |
Standard
|
| PublisherName |
Polish Committee for Standardization
|
| Status |
Superseded
|
| Standards | Relationship |
| ISO 14644-9:2012 | Identical |
| EN ISO 14644-9:2012 | Identical |
Summarise
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