SEMI C23:2014(R2020)
Current
Current
The latest, up-to-date edition.
Specifications for Buffered Oxide Etchants
Available format(s)
Hardcopy
Language(s)
English
Published date
06-01-2020
The purpose of this Document is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards.
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