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SEMI C3.20 : 2014(R2019)

SEMI C3.20 : 2014(R2019)

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Current

The latest, up-to-date edition.

SPECIFICATION FOR HELIUM (HE), IN CYLINDERS, 99.9995%

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides specifications for helium (He) that is used in the semiconductor industry. Also covers requirements for helium used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Revision
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

Standards Relationship
SAC GB/T 16943 : 1997 Identical

SEMI C3 : 2017 SPECIFICATIONS FOR GASES

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