SEMI C3.6:2021
Current
Current
The latest, up-to-date edition.
Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
Available format(s)
Hardcopy
Language(s)
English
Published date
04-01-2021
The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry.
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