SEMI C62 : 2009
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The latest, up-to-date edition.
SPECIFICATION FOR PROGEN PRECURSORS USED IN LOW K CVD PROCESSES
Published date
01-12-2013
Provides specifications for porogen precursors used in Low K CVD processes for which a need has been identified. Also describes the proposed impurity limits for porogen precursors (e.g., Alpha-Terpinine, Limonene, Bicycloheptadiene, and Cyclooctane) used in the semiconductor industry.
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