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SEMI D15 : 1996(R2003)

SEMI D15 : 1996(R2003)

Current

Current

The latest, up-to-date edition.

FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Covering the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement procedures. It is applicable to use this method for the documentation of waviness of all types of glass substrates used for flat panel displays.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
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14/30317961 DC : 0 BS EN 62903-1 ED.1 - PRINTED ELECTRONICS - EQUIPMENT - CONTACT PRINTING - RIGID MASTER - MEASUREMENT METHOD OF PLATE MASTER EXTERNAL DIMENSION
IEC 62899-301-1:2017 Printed electronics - Part 301-1: Equipment - Contact printing - Rigid master - Measurement method of plate master external dimension

SEMI D4 : 1994 METHOD FOR REFERENCING FLAT PANEL DISPLAY SUBSTRATES
SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES

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