SEMI E54.13 : 2011
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERNET/IP(TM)
Published date
01-12-2013
Specifies a communication specification based on the EtherNet/IP (Ethernet/Industrial Protocol) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.
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