SEMI F19 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
Published date
01-12-2013
Specifies the wetted surface characterization requirements and the finish acceptance criteria for tubing and components fabricated in stainless steel per SEMI F20 and intended to control or contain gases and liquids used in semiconductor manufacturing.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.