Name: SEMI M56 : 2007
Brand: SEMI

PRACTICE FOR DETERMINING COST COMPONENTS FOR METROLOGY EQUIPMENT DUE TO MEASUREMENT VARIABILITY AND BIAS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a standard methodology for metrology equipment suppliers and users to determine the cost due to misclassification of product because of measurement variability and bias during testing of the product for conformance to a specification.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2003) Also available in CD-ROM. (02/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI M56 : 2007

PRACTICE FOR DETERMINING COST COMPONENTS FOR METROLOGY EQUIPMENT DUE TO MEASUREMENT VARIABILITY AND BIAS

Abstract

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