SEMI MF1725 : 2010(R2015)
Current
Current
The latest, up-to-date edition.
PRACTICE FOR ANALYSIS OF CRYSTALLOGRAPHIC PERFECTION OF SILICON INGOTS
Published date
01-12-2013
Specifies the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparation, etching solution selection and use, defect identification, and defect counting.
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