SEMI P47 : 2007(R2013)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR EVALUATION OF LINE-EDGE ROUGHNESS AND LINEWIDTH ROUGHNESS
Published date
01-12-2013
Describes standard procedures for calculating the indices for the following two kinds of line roughness to characterize materials and processes for fine line pattern fabrication, especially in the integrated circuit manufacturing environment.
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