SEMI S28 : 2011
Current
Current
The latest, up-to-date edition.
SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
01-12-2013
Specifies a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME).
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.