SS-EN ISO 14644-13:2026
Current
Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2026, IDT)
Hardcopy
English
03-16-2026
This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| Pages |
41
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 14644-13:2026 | Identical |
| EN ISO 14644-13:2026 | Identical |
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