SS-EN ISO 14644-15 : 2017
Superseded
Superseded
View Superseded by
Published date
12-13-2017
Publisher
Superseded date
06-02-2026
Superseded by
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ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).
| Committee |
TC 209
|
| DocumentType |
Standard
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| ISO 14644-15:2017 | Identical |
| EN ISO 14644-15:2017 | Identical |
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