SS-ISO 14644-12 : 2018
Current
Current
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Published date
11-27-2018
Publisher
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This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
| Committee |
TC 209
|
| DocumentType |
Standard
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Current
|
| Standards | Relationship |
| ISO 14644-12:2018 | Identical |
Summarise
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