UNE-EN 62047-16:2015
Current
Current
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
08-01-2015
Publisher
US$69.95
Excluding Tax where applicable
| Committee |
CTN 209/SC 47
|
| DocumentType |
Standard
|
| Pages |
15
|
| PublisherName |
Asociación Española de Normalización
|
| Status |
Current
|
| Standards | Relationship |
| BS EN 62047-16:2015 | Equivalent |
| I.S. EN 62047-16:2015 | Equivalent |
| DIN EN 62047-16:2015-12 | Equivalent |
| EN 62047-16:2015 | Identical |
| IEC 62047-16:2015 | Identical |
Summarise
US$69.95
Excluding Tax where applicable
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