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UNE-EN ISO 14644-5:2005

Superseded

Superseded

View Superseded by

Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)

Available format(s)

Hardcopy , PDF

Language(s)

Spanish, Castilian, English

Published date

03-16-2005

Superseded date

04-01-2026

Superseded by

UNE-EN ISO 14644-5:2026

US$132.13
Excluding Tax where applicable

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Specification of requirements
Annex A (informative) Operational systems
Annex B (informative) Cleanroom clothing
Annex C (informative) Personnel
Annex D (informative) Stationary equipment
Annex E (informative) Materials and portable equipment
Annex F (informative) Cleanroom cleaning
Bibliography

Este proyecto de norma fue tramitado por el procedimiento de Información Pública Paralela.

Committee
CTN 100
DocumentType
Standard
Pages
54
PublisherName
Asociación Española de Normalización
Status
Superseded
SupersededBy

US$132.13
Excluding Tax where applicable