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BS EN ISO 18452:2016

Current

Current

The latest, up-to-date edition.

Fine ceramics (advanced ceramics, advanced technical ceramics). Determination of thickness of ceramic films by contact-probe profilometer

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

04-30-2016

1 Scope
2 Normative references
3 Terms and definitions
4 Principle of measurement
5 Test environment
6 Apparatus
7 Test pieces
8 Procedure
9 Calculation
10 Limits to step height
11 Test report
Annex A (informative) - Effect of amplification factor
        and levelling error on measured layer thickness

Describes a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer.

This International Standard specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.

Committee
RPI/13
DevelopmentNote
Supersedes BS EN 1071-1. (05/2016)
DocumentType
Standard
Pages
18
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
ISO 18452:2005 Identical
EN ISO 18452 : 2016 Identical

ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments

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