BS ISO 14606:2015
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials
Hardcopy , PDF
02-15-2023
English
12-31-2015
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Symbols and abbreviated terms
4 Setting parameters for sputter depth profiling
5 Depth resolution at an ideally sharp interface in
sputter depth profiles
6 Procedures for optimization of parameter settings
Annex A (informative) - Factors influencing the depth
resolution
Annex B (informative) - Typical single-layered systems as
reference materials
Annex C (informative) - Typical multilayered systems used
as reference materials
Annex D (informative) - Uses of multilayered systems
Bibliography
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