ÖNORM EN ISO 14644-3:2020 02 15
Withdrawn
View Superseded by
Cleanrooms and associated controlled environments Part 3: Test methods (ISO 14644-3:2019)
Hardcopy
English
02-15-2020
08-01-2020
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.
| Committee |
TC 209
|
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Osterreichisches Normungsinstitut/Austrian Standards
|
| Status |
Withdrawn
|
| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| EN ISO 14644-3:2019 | Identical |
| ISO 14644-3:2019 | Identical |
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