ONORM EN ISO 14644-3 : 2006
Withdrawn
View Superseded by
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
01-12-2013
02-15-2020
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particle measurement
3.3 Air filters and systems
3.4 Airflow and other physical states
3.5 Electrostatic measurement
3.6 Measuring apparatus and measuring conditions
3.7 Occupancy states
4 Test procedures
4.1 Cleanroom tests
4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of
an installation and the sequence in which to
carry them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography
Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.
| DocumentType |
Standard
|
| PublisherName |
Osterreichisches Normungsinstitut/Austrian Standards
|
| Status |
Withdrawn
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-3:2005 | Identical |
| ISO 14644-3:2005 | Identical |
| NF EN ISO 14644-3 : 2006 | Identical |
| NEN EN ISO 14644-3 : 2006 | Identical |
| NS EN ISO 14644-3 : 1ED 2006 | Identical |
| DIN EN ISO 14644-3:2006-03 | Identical |
| I.S. EN ISO 14644-3:2006 | Identical |
| BS EN ISO 14644-3:2005 | Identical |
| NBN EN ISO 14644-3 : 2006 | Identical |
| UNE-EN ISO 14644-3:2006 | Identical |
| ISO 14644-2:2015 | Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
| ISO 7726:1998 | Ergonomics of the thermal environment — Instruments for measuring physical quantities |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |