NS EN ISO 14644-3 : 1ED 2006

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
  3.1 General
  3.2 Airborne particle measurement
  3.3 Air filters and systems
  3.4 Airflow and other physical states
  3.5 Electrostatic measurement
  3.6 Measuring apparatus and measuring conditions
  3.7 Occupancy states
4 Test procedures
  4.1 Cleanroom tests
  4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of
        an installation and the sequence in which to
        carry them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography

Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.