13/30203227 DC : 0
Superseded
View Superseded by
BS ISO 13083 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - STANDARDS ON THE DEFINITION AND CALIBRATION OF SPATIAL RESOLUTION OF SCANNING SPREADING RESISTANCE MICROSCOPY AND SCANNING CAPACITANCE MICROSCOPY
Hardcopy , PDF
English
08-31-2015
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
6 Measurement of lateral resolution of SCM with the sharp-edge
method
7 Measurement of lateral resolution of SSRM with the sharp-edge
method
Annex A (informative) - An example of the measurement of SCM
resolution
Annex B (informative) - An example of the measurement of SSRM
resolution
Bibliography
BS ISO 13083
| Committee |
CII/60
|
| DocumentType |
Draft
|
| Pages |
20
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 18115:2001 | Surface chemical analysis — Vocabulary |
| ISO 18516:2006 | Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution |
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