ISO 18516:2006
Withdrawn
View Superseded by
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
Hardcopy , PDF
English, French
10-19-2006
04-09-2025
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.
Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
| Committee |
ISO/TC 201/SC 2
|
| DevelopmentNote |
DRAFT ISO/DIS 18516 is also available for this standard. (12/2014)
|
| DocumentType |
Standard
|
| Pages |
24
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy |
| Standards | Relationship |
| BS ISO 18516:2006 | Identical |
| NF ISO 18516 : 2008 | Identical |
| SAC GB/T 28632 : 2012 | Identical |
| BS ISO 18337:2015 | Surface chemical analysis. Surface characterization. Measurement of the lateral resolution of a confocal fluorescence microscope |
| 09/30191895 DC : 0 | BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS |
| ISO/TR 19319:2013 | Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods |
| ASTM E 1016 : 2007 : R2012 : EDT 1 | Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers |
| BS ISO 10810:2010 | Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis |
| ISO 10810:2010 | Surface chemical analysis — X-ray photoelectron spectroscopy — Guidelines for analysis |
| 13/30203227 DC : 0 | BS ISO 13083 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - STANDARDS ON THE DEFINITION AND CALIBRATION OF SPATIAL RESOLUTION OF SCANNING SPREADING RESISTANCE MICROSCOPY AND SCANNING CAPACITANCE MICROSCOPY |
| ASTM E 2735 : 2014 : REDLINE | Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments |
| ISO 27911:2011 | Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope |
| PD ISO/TR 14187:2011 | Surface chemical analysis. Characterization of nanostructured materials |
| 14/30273817 DC : 0 | BS ISO 18337 - SURFACE CHEMICAL ANALYSIS - SURFACE CHARACTERIZATION MEASUREMENT OF THE LATERAL RESOLUTION OF A CONFOCAL FLUORESCENCE MICROSCOPE |
| PD ISO/TR 18196:2016 | Nanotechnologies. Measurement technique matrix for the characterization of nano-objects |
| PD ISO/TR 19319:2013 | Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods |
| ISO 18337:2015 | Surface chemical analysis — Surface characterization — Measurement of the lateral resolution of a confocal fluorescence microscope |
| ISO/TR 18196:2016 | Nanotechnologies — Measurement technique matrix for the characterization of nano-objects |
| ASTM E 1016 : 2007 | Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers |
| BS ISO 27911:2011 | Surface chemical analysis. Scanning-probe microscopy. Definition and calibration of the lateral resolution of a near-field optical microscope |
| BS ISO 13083:2015 | Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes |
| ISO 13083:2015 | Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes |
| ASTM E 1217 : 2011 : REDLINE | Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers |
| ISO/TR 14187:2011 | Surface chemical analysis — Characterization of nanostructured materials |
| ISO 21270:2004 | Surface chemical analysis — X-ray photoelectron and Auger electron spectrometers — Linearity of intensity scale |
| ISO 15470:2017 | Surface chemical analysis — X-ray photoelectron spectroscopy — Description of selected instrumental performance parameters |
| ISO 18115:2001 | Surface chemical analysis — Vocabulary |
| ISO/TR 19319:2013 | Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods |
| ISO 15471:2016 | Surface chemical analysis — Auger electron spectroscopy — Description of selected instrumental performance parameters |
Please Login or Create an Account so you can add users to your Multi user PDF Later.
Important note : All end users must be registered with an Account prior to user licenses being assigned.
Users cannot be edited or removed once added to your Multi user PDF.