16/30338636 DC : 0
Superseded
BS IEC 62047-30 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM
Hardcopy , PDF
English
10-31-2017
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric
thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring
method of MEMS piezoelectric thin film
Bibliography
BS IEC 62047-30.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
38
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| EN 50324-2:2002 | Piezoelectric properties of ceramic materials and components - Part 2: Methods of measurement - Low power |
| IEC 60483:1976 | Guide to dynamic measurements of piezoelectric ceramics with high electromechanical coupling |
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