ASTM E 673 : 2002 : REV A
Superseded
View Superseded by
Standard Terminology Relating to Surface Analysis
English
12-10-2002
11-11-2014
| Committee |
E 42
|
| DocumentType |
Reference Material
|
| Pages |
10
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
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