ASTM F 805 : 1983 : R1992 : EDT 1
Withdrawn
Test Method for Photoplate Surface Flatness by Inteferometric Non-Contact Technique (Withdrawn 1996)
English
12-31-2010
12-31-2010
CONTAINED IN VOL 10.05 1997 Describes use of grazing incidence interferometer for measuring maximum peak-to-valley deviation (TIR) of specimen surface. Limited to interferometers using monochromatic light source.
| Committee |
ASTM
|
| DocumentType |
Test Method
|
| Pages |
6
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| ASTM F 579 : 1980 : R1987 : EDT 1 | Test Method for Face Flatness by Optical Non-Contact Technique (Withdrawn 1994) |
| ANSI Z136.1 : 2014 | SAFE USE OF LASERS |
| ASTM F 775 : 1988 | Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991) |
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