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ASTM F 816 : 1983 : R1998 : EDT 1

Superseded

Superseded

View Superseded by

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages

Available format(s)

PDF

Language(s)

English

Published date

12-31-2010

Superseded date

11-11-2014

US$73.00
Excluding Tax where applicable

CONTAINED IN VOL. 10.04, 2009 Covers hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used.

Committee
F 01
DocumentType
Test Method
Pages
4
ProductNote
Reconfirmed EDT 1
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy

1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.

ASTM F 134 : 1985 RECOMMENDED PRACTICES FOR DETERMINING HERMETICITY OF ELECTRON DEVICES WITH A HELIUM MASS SPECTROMETER LEAK DETECTOR
FED-STD-209 Revision E:1992 Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2)
ASTM F 98 : 1972 : R1977 Recommended Practices for Determining Hermeticity of Electron Devices by a Bubble Test (Withdrawn 1990)

US$73.00
Excluding Tax where applicable