ASTM F 863 : 1984 : R1992 : EDT 1
Withdrawn
Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)
English
12-31-2010
01-01-1996
CONTAINED IN VOL 10.05 1997 Detects defects in spin-coated resist on clear substrates used in the evaluation and process control of spin-coating resist systems.
| Committee |
ASTM
|
| DocumentType |
Standard Practice
|
| Pages |
2
|
| ProductNote |
et NOTE-Editorial changes were made throughout in February 1992.
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| FED-STD-209 Revision E:1992 | Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2) |
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