ASTM F 890 : 1984 : R1992
Withdrawn
Withdrawn
Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
Available format(s)
PDF
Language(s)
English
Published date
12-31-2010
Withdrawn date
10-01-1996
US$73.00
Excluding Tax where applicable
CONTAINED IN VOL 10.05 1997 Outlines method for counting number of pinholes in a photoresist film.
| Committee |
ASTM
|
| DocumentType |
Standard Practice
|
| Pages |
3
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| FED-STD-209 Revision E:1992 | Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2) |
| MIL-STD-105 Revision E:1989 | Sampling Procedures and Tables for Inspection by Attributes (See Notice 3 for Replacement Information) |
Summarise
US$73.00
Excluding Tax where applicable
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