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DIN 50441-2:1998-11

Withdrawn

Withdrawn

TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 2: TESTING OF EDGE PROFILE

Published date

01-12-2013

Withdrawn date

01-01-2009

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DocumentType
Standard
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Withdrawn

DIN 50441-4:1999-03 TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 4: SLICE DIAMETER, DIAMETER VARIATION, FLAT DIAMETER, FLAT LENGTH, FLAT DEPTH

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