DIN 50441-4:1999-03
Withdrawn
Withdrawn
TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 4: SLICE DIAMETER, DIAMETER VARIATION, FLAT DIAMETER, FLAT LENGTH, FLAT DEPTH
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-12-2013
Withdrawn date
01-01-2009
Excluding Tax where applicable
Gives methods for measuring the diameter, variations in diameter, and flat diameter, depth and length of circular semi-conductor wafers.
| DocumentType |
Standard
|
| Pages |
10
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Withdrawn
|
| DIN 50441-2:1998-11 | TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 2: TESTING OF EDGE PROFILE |
| DIN 50441-1:1996-07 | TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - DETERMINATION OF THE GEOMETRIC DIMENSIONS OF SEMICONDUCTOR WAFERS - PART 1: THICKNESS AND THICKNESS VARIATION |
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