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DIN EN 62047-11:2014-04

Current

Current

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR COEFFICIENTS OF LINEAR THERMAL EXPANSION OF FREE-STANDING MATERIALS FOR MICRO-ELECTROMECHANICAL SYSTEMS (IEC 62047-11:2013)

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

04-01-2014

US$133.45
Excluding Tax where applicable

DevelopmentNote
Supersedes DIN IEC 62047-11. (04/2014)
DocumentType
Standard
Pages
21
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current
Supersedes

Standards Relationship
EN 62047-11:2013 Identical
IEC 62047-11:2013 Identical

US$133.45
Excluding Tax where applicable