DIN IEC 62047-11:2010-06 (Draft)
Superseded
Superseded
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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR LINEAR THERMAL EXPANSION COEFFICIENTS OF MEMS MATERIALS
Published date
01-12-2013
Superseded date
04-01-2014
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| DocumentType |
Draft
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
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| Status |
Superseded
|
| SupersededBy |
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Sorry this product is not available in your region.