DIN EN 62047-4:2011-03
Current
Current
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
Available format(s)
Hardcopy , PDF
Language(s)
German
Published date
01-01-2011
US$136.55
Excluding Tax where applicable
| DevelopmentNote |
Supersedes DIN IEC 62047-4. (03/2011)
|
| DocumentType |
Standard
|
| Pages |
22
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| IEC 62047-4:2008 | Identical |
| EN 62047-4:2010 | Identical |
Summarise
US$136.55
Excluding Tax where applicable