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DIN EN 62047-4:2011-03

Current

Current

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

01-01-2011

US$136.55
Excluding Tax where applicable

DevelopmentNote
Supersedes DIN IEC 62047-4. (03/2011)
DocumentType
Standard
Pages
22
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current
Supersedes

Standards Relationship
IEC 62047-4:2008 Identical
EN 62047-4:2010 Identical

US$136.55
Excluding Tax where applicable