DIN IEC 62047-12:2010-05 (Draft)
Superseded
Superseded
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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 12: A METHOD FOR FATIGUE TESTING THIN FILM MATERIALS USING THE RESONANT VIBRATION OF A MEMS STRUCTURE
Published date
01-12-2013
Superseded date
06-01-2012
Superseded by
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| DocumentType |
Draft
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Superseded
|
| SupersededBy |
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Sorry this product is not available in your region.