EN 62047-1:2006
Withdrawn
Withdrawn
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Published date
06-16-2006
Withdrawn date
06-01-2009
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This part of EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
| DocumentType |
Standard
|
| PublisherName |
European Committee for Standards - Electrical
|
| Status |
Withdrawn
|
| Standards | Relationship |
| DIN EN 62047-1:2006-10 | Equivalent |
| I.S. EN 62047-1:2006 | Equivalent |
| BS EN 62047-1:2006 | Equivalent |
| UNE-EN 62047-1:2006 | Identical |
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