BS EN 62047-1:2006
Superseded
View Superseded by
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Hardcopy , PDF
English
09-29-2006
05-01-2016
| Committee |
EPL/47
|
| DocumentType |
Standard
|
| Pages |
28
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
| Standards | Relationship |
| EN 62047-1:2006 | Equivalent |
| I.S. EN 62047-1:2006 | Equivalent |
| EN 61223-3-1:1999 | Identical |
| DIN EN 62047-1:2006-10 | Equivalent |
| IEC 62047-1:2005 | Identical |
| UNE-EN 62047-1:2006 | Equivalent |
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