IEC 62047-1:2005
Superseded
View Superseded by
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Hardcopy , PDF
English - French, Russian
09-27-2005
09-12-2022
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
| Committee |
TC 47/SC 47F
|
| DocumentType |
Standard
|
| Pages |
49
|
| PublisherName |
International Electrotechnical Committee
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| UNE-EN 62047-1:2016 | Identical |
| UNE-EN 62047-1:2006 | Identical |
| BS EN 62047-1:2006 | Identical |
| BS EN 61223-3-1:1999 | Identical |
| JIS C 5630-1:2008 | Identical |
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