ISO 18116:2005
Withdrawn
Withdrawn
View Superseded by
Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis
Available format(s)
PDF
Language(s)
French, English
Published date
08-22-2005
Withdrawn date
04-09-2025
Superseded by
US$143.00
Excluding Tax where applicable
ISO 18116:2005 gives guidance on methods of mounting and surface treatment for a specimen about to undergo surface chemical analysis. It is intended for the analyst as an aid in understanding the specialized specimen-handling conditions required for analyses by techniques such as Auger electron spectroscopy, secondary-ion mass spectrometry, and X-ray photoelectron spectroscopy.
| Committee |
ISO/TC 201/SC 2
|
| DevelopmentNote |
Supersedes ISO/DIS 18116 (08/2005)
|
| DocumentType |
Standard
|
| Pages |
17
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy | |
| UnderRevision |
| Standards | Relationship |
| NF ISO 18116 : 2006 | Identical |
| BS ISO 18116:2005 | Identical |
| SAC GB/T 30815 : 2014 | Identical |
| NEN ISO 18116 : 2005 | Identical |
| AS ISO 18116-2006 | Identical |
| JIS K 0154:2017 | Identical |
| BS EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration |
| 13/30261587 DC : 0 | BS ISO 17862 - SURFACE CHEMICAL ANALYSIS - SECONDARY ION MASS SPECTROMETRY - LINEARITY OF INTENSITY SCALE IN SINGLE ION COUNTING TIME-OF-FLIGHT MASS ANALYSERS |
| ISO 18117:2009 | Surface chemical analysis — Handling of specimens prior to analysis |
| I.S. EN ISO 14644-10:2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013) |
| ASTM E 2695 : 2009 | Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy (Withdrawn 2018) |
| ISO 17862:2013 | Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers |
| ISO 14701:2011 | Surface chemical analysis — X-ray photoelectron spectroscopy — Measurement of silicon oxide thickness |
| 09/30184131 DC : 0 | BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION |
| BS ISO 16129:2012 | Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer |
| 18/30368966 DC : 0 | BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS |
| BS ISO 18117:2009 | Surface chemical analysis. Handling of specimens prior to analysis |
| BS ISO 16242:2011 | Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES) |
| 10/30212265 DC : 0 | BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS |
| ISO 13424:2013 | Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis |
| BS ISO 14701:2011 | Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness |
| DIN EN ISO 14644-10:2013-06 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| ASTM E 2735 : 2014 : REDLINE | Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments |
| PD ISO/TR 14187:2011 | Surface chemical analysis. Characterization of nanostructured materials |
| BS ISO 29081:2010 | Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction |
| BS ISO 13424:2013 | Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis |
| BS ISO 16243:2011 | Surface chemical analysis. Recording and reporting data in X-ray photoelectron spectroscopy (XPS) |
| 07/30172470 DC : 0 | BS ISO 18117 - SURFACE CHEMICAL ANALYSIS - HANDLING OF SPECIMENS PRIOR TO ANALYSIS |
| 11/30230635 DC : 0 | BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER |
| ISO 10810:2010 | Surface chemical analysis — X-ray photoelectron spectroscopy — Guidelines for analysis |
| BS ISO 17862:2013 | Surface chemical analysis. Secondary ion mass spectrometry. Linearity of intensity scale in single ion counting time-of-flight mass analysers |
| ISO 16242:2011 | Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES) |
| ISO 16243:2011 | Surface chemical analysis — Recording and reporting data in X-ray photoelectron spectroscopy (XPS) |
| BS ISO 10810:2010 | Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis |
| 18/30368969 DC : 0 | BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER |
| 09/30191895 DC : 0 | BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS |
| ISO 29081:2010 | Surface chemical analysis — Auger electron spectroscopy — Reporting of methods used for charge control and charge correction |
| EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| 11/30196563 DC : 0 | BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION |
| ISO 16129:2012 | Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer |
| ISO/TR 14187:2011 | Surface chemical analysis — Characterization of nanostructured materials |
| UNE-EN ISO 14644-10:2014 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| ISO 18115:2001 | Surface chemical analysis — Vocabulary |
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US$143.00
Excluding Tax where applicable
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