ISO 25178-603:2025
Current
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Hardcopy , PDF
English, French
02-14-2025
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| DocumentType |
Standard
|
| Pages |
18
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| SS-EN ISO 25178-603:2025 | Identical |
| DS/ISO 25178-603:2025 | Identical |
| DS/EN ISO 25178-603:2025 | Identical |
| NS-EN ISO 25178-603:2025 | Identical |
| BS EN ISO 25178-603:2025 | Equivalent |
| I.S. EN ISO 25178-603:2025 | Equivalent |
| UNE-EN ISO 25178-603:2025 | Equivalent |
| UNE-EN ISO 25178-603:2025 | Identical |
| DIN EN ISO 25178-603:2025-12 | Equivalent |
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