ISO 25178-603:2013
Withdrawn
View Superseded by
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Hardcopy , PDF
English, French
09-25-2013
04-09-2025
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
| Committee |
ISO/TC 213
|
| DevelopmentNote |
Supersedes ISO/DIS 25178-603. (09/2013)
|
| DocumentType |
Standard
|
| Pages |
28
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy | |
| UnderRevision |
| Standards | Relationship |
| NF EN ISO 25178-603 : 2013 | Identical |
| NBN EN ISO 25178-603 : 2013 | Identical |
| NEN EN ISO 25178-603 : 2013 | Identical |
| NS EN ISO 25178-603 : 2013 | Identical |
| I.S. EN ISO 25178-603:2013 | Identical |
| PN EN ISO 25178-603 : 2013 | Identical |
| BS EN ISO 25178-603:2013 | Identical |
| EN ISO 25178-603:2013 | Identical |
| DIN EN ISO 25178-603:2014-02 | Identical |
| DS EN ISO 25178-603 : 2013 | Identical |
| UNE-EN ISO 25178-603:2013 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) — Masterplan |
| ISO 8015:2011 | Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14978:2006 | Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment |
| ISO 25178-6:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture |
| ISO 10934-2:2007 | Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced techniques in light microscopy |
| ISO 14253-1:2017 | Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications |
| ASME B46.1 : 2009 | SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY) |
| ISO 25178-3:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology — Basic and general concepts and associated terms (VIM) |
| ISO 25178-601:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments |
| ISO 25178-602:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters |
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